Modeling on RF Circuit and Thermal Conduction of a MEMS Amplitude Demodulator

An amplitude demodulator, using an on-line MEMS power sensor is studied in this paper. The model of the equivalent circuit of on-line structure is solved, and the heat transfer model related to the thermopile is proposed and also simulated to verify the feasibility of AM demodulation. Experiments are also performed to verify the proposed models. The microwave performance shows that the device has a return loss that is better than 20 dB, and an insertion loss of less than 0.5 dB up to 10 GHz. Both the model and the experimental results show that the MEMS device can perform demodulation of an AM signal with carrier frequency of 0.01–10 GHz and signal frequency of under 1kHz. [2021-0261]