Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability

This research introduces a closed-loop method to improve the zero-rate output (ZRO) stability of amplitude-modulated (AM) capacitive MEMS gyroscopes, even in absence of quadrature compensation electrodes. The method relies on the direct measurement and closed-loop compensation of the variation of the relative phase between the quadrature output, modulated by the drive carrier frequency, and the demodulation reference. The closed loop includes a phase meter, whose output regulates the phase of the lock-in amplifier inside the sense-mode, open-loop, demodulation chain. The proposed technique, tested on the pitch axis of a consumer-grade commercial monolithic 3-axis gyroscope, brings up to 300-fold stability improvements over temperature transients, without affecting noise and scale-factor performance. Stability limits depend on the phase meter resolution and on the lock-in granularity in regulating the phase. Overall, a mdps/K stability is obtained with a one-time calibration at ambient temperature and no post-acquisition processing. [2021-0049]