Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing

This work presents a long-term characterization of a newly designed microelectromechanical-system (MEMS) micromirror capable of achieving a field-of-view (FOV) of almost 94°. The process used to fabricate the device allows to combine piezoelectric (PZT) actuation and piezoresistive (PZR) sensing of the tilt angle, enabling testing under closed loop control. Consistently with the adopted design guidelines, which considered fatigue limits on the silicon springs, the tested devices are able to withstand up to 3.6 billion continuous operating cycles in an uncontrolled laboratory environment when operated in resonant mode at 500 Hz. [2020-0366]