Optimization of Inactive Regions of Lithium Niobate Shear Mode Resonator for Quality Factor Enhancement

This work presents the development of a novel process flow for the fabrication of Lithium niobate Lamb wave resonator that allows full control of the shape and size of the released area (undercut) necessary for stabilizing quality factor. We then investigate the influence of the inactive regions of the resonator (i.e. undercut, anchor, bus and gap) on Q; and determine the optimum dimensions for those regions in order to limit the flow of energy escaping from the resonator's body resulting in overall improvement in Q. We report devices with electromechanical coupling ( k
_t
²
) of 41% and quality factor ( Q) of 1900 at around 290 MHz resulting in the highest-ever achieved Figure-of-Merit (FoM) of 780 for SH0 mode resonators in X-cut LN. [2020-0363]