Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes

In this paper, we observe amplitude-dependent nonlinear dissipation in experimental measurements of the quality factor (Q). The ringdown response is used to quantify the magnitude of the amplitude-dependent effect in both polysilicon and single crystal silicon (SCS). The Q is reduced in both materials, up to 15.6%, and has a stronger influence on the measurements of Q in polysilicon than in SCS. Since the measured limiting dissipation mechanism in these resonators is thermoelastic dissipation (TED), we suggest these results align with models of amplitude-dependent TED. [2020-0160]