Reconfigurable Multiband Terahertz Metamaterial Using Triple-Cantilevers Resonator Array

We propose reconfigurable metamaterials with multiband resonance in the terahertz (THz) frequency range. By modifying the pattern width and gap of metamaterial, these designs exhibit the characteristics of polarization-dependence, dual-band resonance, and triple-band resonance. Two cantilever metamaterial (CM) devices are demonstrated by using micro-electro-mechanical system (MEMS) based bimorph cantilevers array, which can be deflected toward the out-of-plane direction. The measured transmission spectra are greatly agreed well with the simulation results. By applying different direct current (DC) bias voltages, the bending degree and electromagnetic response of CM device could be controlled. The multiband resonance can be tuned in the range of 0.33 THz by applying a DC bias voltage of 30 volts. The relationship of the resonant shifts and the applied DC bias voltages is quite linear, which can assist the device to be more controllable and applied in more fields. Such designs are promising to be used in various applications, such as frequency-selective detectors, multispectra imagers, and multifunctional switches in the THz frequency range. [2020-0236].