Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators

This work demonstrates that thin slots strategically placed in MEMS ring resonators are able to enhance the quality factor (Q) of the device operated in a wineglass mode in the isothermal region. The devices are optimized using COMSOL for an increased Q through increased slot size, using the Zener curve as a comparative baseline. These parts are fabricated and encapsulated in an ultra-clean environment, and tested in various temperature and pressure conditions to directly measure changes in anchor, gas, and thermoelastic dissipation across temperature. [2020-0156].