Development of Suspension-Free Mirror Array Device and Its Application to Large Screen Size Holographic Displays

We developed a suspension-free two-dimensional mirror array device and confirmed the light deflection characteristics of this structure. The device outputs two values by tilting a mirror with no fixed point in two directions by electrostatic attraction. Through experiments, we confirm that our device is superior to conventional mirror devices including low-voltage drive, and high-speed light deflection, due to the suspension-free operation. Furthermore, we confirm that the device’s light deflection operation continues even with the voltage-driving method of lowering the applied voltage before the end of light deflection. Finally, we propose how to take advantage of this device to display holographic images on large screen sizes. [2022-0170]