Investigation on total-ionizing-dose radiation response for high voltage ultra-thin layer SOI LDMOS

Total-ionizing-dose radiation response for 600V ultra-thin layer SOI LDMOS transistor is investigated. Radiation conduction modulation model is proposed to reveal the degradation mechanism of conduction current and breakdown voltage. Multi-interface irradiation damage cause positive net trapped charge, which reduces on-resistance equivalently and enhance conduction current. Meanwhile, they suppress the depletion in the drift region at off-state and then decrease breakdown voltage. Based on the model, irradiation induced net trapped charge density are extracted to evaluate the irradiation damage in drift region.