Si wafer technology for power devices: A review and future directions

Silicon wafers have been widely used in semiconductor devices for years. Their characteristics have been improved by untiring development efforts to meet power device manufacturers' requirements such as lowering substrate resistivity for Power MOSFET and reducing resistivity variation for IGBT. As future directions, by utilizing advantages of silicon wafers, adoption of MCZ grown bulk silicon wafers for low and middle voltage IGBT and introduction of 300mm size silicon wafers will proceed.