Electrical characteristics of WO3/Ag/WO3 sandwich structure fabricated with magnetic-control sputtering metrology

Using the magnetic-control sputtering fabrication, WO
₃
/Ag/WO
₃
thin film was successfully formed as a sandwich structure treated as a transparent conductive thin film. The thicknesses of silver and tungsten oxide were 10 to 20nm and 50 to 60nm, respectively. For the increase of silver thickness from 10 to 20nm, the sheet resistance is reduced. However, this effect in tungsten oxide is entirely reversed. As the electrical measurement was applied to this tested sandwich structure, the conductivity is better than that for the single layer of tungsten oxide due to the conduction contribution from the silver layer.