Anneal effect of Er doped zinc oxide by spray pyrolysis

Zinc oxide thin films with and without erbium doping were prepared by spray pyrolysis with zinc chloride and erbium acetate precursors. Film thickness profile after 700°C annealing process were analyzed. With the anneal time increase, rough and smooth surface were characterized for the ZnO and ZnO:Er samples respectively. The 10K photoluminescence were applied for the film characterization.