A novel lithographic material constructed by polymerizable liquid crystal molecule

This study is aimed at bringing up a novel approach to form higher-resolution patterns which can be used in the lithography field. The idea is operated through taking advantage of the arranging ability of liquid crystal molecules. A polymerizable liquid crystal molecule with specific structure is synthesized at first, then POM and SAXS are done to confirm the specific morphology of the molecule, and application in lithography will be accomplished in the near future. With the continuous stream of integrated circuits with significant size reduction, traditional photolithographic methodologies are thwarted to reduced feature sizes. Meanwhile, other existing methods or materials still have their own shortcomings. Therefore, a new method needs to be conceived to form long-order patterns with small feature sizes.