A Method for Quantitatively Investigating the Rear-Side Passivation Performance of PERC Cells

A method that can have insight into the rear-side passivation performance of passivated emitter and real cells (PERC) is crucial for further improving the cell efficiency. In this paper, we propose a method based on high-resolution laser beam induced current (HR-LBIC) for investigating the rear-side passivation performance of PERC cells. Using this method, the performance of local back surface field (LBSF) regions and rear dielectric passivation regions can be distinguished quantitatively, and it helps easily comparing the cells with different rear-side passivation performance. Most importantly, the potential Voc of the PERC cells under current used aluminum paste can be estimated as well.