A new method for quickly evaluating reversible and permanent components of the BTI degradation

A new method denoted SRP is proposed to quickly evaluate reversible and permanent components responsible for BTI degradation. It is based on a particular normalization of NBTI drifts measured during DC stress and recovery. The origin of this SRP is then highlighted by a complete modeling of NBTI dataset. It actually arises from the presence of two trap populations with much different capture and emission time constants. The technique which can only be seen as a mathematical trick is very suitable to address the sensitivity of several process steps like nitridation to BTI. It can also provide a simple analytical compact model easy to implement in a SPICE-like simulator to analyze BTI reliability at circuit level.