CVD graphene materials integration: Pressure and argon sensor

We demonstrate a pressure sensor and argon gas sensor based on CVD graphene film. The pressure sensing mechanism is based on strain-induced changes in the band structure. While the gas sensor mechanism is based on the mass sensing approach for the graphene. Electrical measurements data demonstrate the feasibility of both sensors. The sensors were formed by using CVD graphene film with a active area size of 2×1cm
²
, that was transferred on top of Si/SiO
₂
substrate with silver as top metal contact.