MEMS enabled scalable fabrication of high performance lithium ion battery electrodes

This paper reports a fabrication scheme that utilizes MEMS techniques to manufacture high performance lithium ion battery electrodes. The technology enables precise control over all electrode dimensions while maintaining a high surface area geometry that leads to excellent capacity retention and power/energy density performance. Additionally, this scalable scaffold approach allows the same fabrication process to generate electrodes anywhere from 10
^-3
-1 cm
³
in volume, which gives rise to high total energy output. These scalable, high surface area 3-D constructs could also be applicable in pre-concentrators for chemical sensors as well as in high throughput microfluidic applications.