Mechanical characterization of ultra-thin membrane using force sensing chip

Measuring mechanical properties of tissues have been important. Since these living samples generally have a nonlinearity between deformation amount and reaction force, a force sensor having wide measurement range with high resolution is highly demanded. In addition, ultra-thin membrane such as inner limiting membrane (ILM) has difficulty on clamping method because of its thickness. In study, we present measurement system of ultra-thin membrane using the quartz crystal resonator (QCR) load sensor and suction fixation devices using MEMS process. We succeed in tensile test of poly(vinyl alcohol) film which is simulating ILM in liquid environment by using constructed system.