Applications of FS laser radiation for formation of thermochemical LIPSS on Cr films and fabrication of submicron amplitude gratings

The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.