Packaged BiCMOS embedded RF-MEMS test vehicles for space applications

This paper presents RF-MEMS test vehicles: Single-Pole Single-Throw (SPST), Single-Pole Double-Throw (SPDT) switches and high-voltage generators integrated with SPST switches that are designed and fabricated in IHP's 0.25 μm SiGe BiCMOS technology for K-band (18-27 GHz) space applications. All the fabricated RF-MEMS test vehicles are packaged by a wafer-to-wafer packaging technique. The fabricated RF-MEMS test vehicles are electrically characterized on 8-inch wafer level and the experimental data clearly shows the high yield of the packaged RF-MEMS test vehicles; thus promising for prototyping and volume production.