Structural phase state of thin film systems based on Ru and Co

The paper presents results of studying the structure and phase composition of Ru thin films and two- and three-layer film systems based on Ru i Co. It was established that the single-phase composition of thin-film samples Ru is observed at thicknesses Ru d
_Ru
≥ 40 nm corresponds to hcp- Ru with lattice parameters a
_Ru
= 0.268 nm and c
_Ru
= 0.430 nm which are close to the table values. The crystal structure of samples at d
_Ru
≥ 40 nm almost independent of the sample thickness and the average grain size is L
_m
= 8 ÷ 10 nm. It is shown that in the formation of two- and three-layer thin films structures based on Co and Ru the individuality of each layer preserved which consists of the phase hcp-Co and hcp - Ru completely. In all cases when the samples are burned up to T
_v
= 900 K increase in the size of the grains is observed. In case of multilayered samples, the dimensional dependence of the increase in the average grain size depending on the thickness of the Ru layer can be traced.