Simulation method and measurement system of electromagnetic force used in micromanipulation systems

Many examples for the usage of electromagnetic forces in micromanipulation systems are available in the literature. The behavior of electromagnet and the dependence of their electromagnetic force on different parameters are a classical subject. In this respect, this paper presents a method to model, simulate and measure the electromagnetic force of a small electromagnet, used as actuator for compliant elements of micromanipulation system. In order to model and simulate the electromagnetic force COMSOL and FEM applications are used. Also the magnetic flux density and the electromagnetic force were measured in different points. Afterwards, simulation and experimental results are compared.