Introduction
Industrial applications using fast-moving high-precision stages, e.g. lithographic equipment (see Fig. 1 [1]), require power amplifiers with high-precision output current generation capabilities. Errors produced by the amplifier with respect to the current reference influence the stationary and dynamic positioning accuracy of a high-precision mechatronic system [2], [3]. Current research focuses on the improvement of the performance of high-precision amplifiers, e.g. [4], [5], and position control of high-precision stages, e.g. [1], [6], [7], independently. However, the influence of the performance of the amplifier on the position accuracy of the moving stage has not been analysed yet.