Design, simulation and a comparative study of square, rectangular, triangular and dual beamed RF MEMS switch for switching applications

The mechanical response of RF MEMS polysilicon bridge structure is studied by using COMSOL Multiphysics and FEM simulations. Geometrical structural effect on switching phenomenon is estimated. 3D simulations have been performed to get the deformed shape of the bridge, depending on the electrical actuation of the suspended bridge. Time domain analysis of the simulation revealed that dual bridge structured switch shows better displacement and capacitance as compared with other bridge structures. A max displacement of 0.9μm and capacitance of 4.7pF is obtained for dual structure. A high switching speed of 23.6842ms is obtained.