Millimeter-Wave Air-Filled Slot Antenna With Conical Beam Based on Bulk Silicon MEMS Technology

In this communication, a millimeter-wave (mm-wave) air-filled slot antenna with a conical beam at 60 GHz is proposed. The antenna is suitable to be integrated with various IC systems mainly because it is designed and fabricated based on bulk silicon microelectromechanical systems (MEMS) technology. The whole structure is composed of an antenna part and a waveguide to substrate integrated waveguide (SIW) converter. In the antenna part, four meander slots are arranged annularly and excited by a square air cavity. The conical radiation pattern benefits from the out-phase E-field excited on slots. An operating bandwidth of 2.17% for S11 <; -10 dB and a conical beam peak gain of 3.21 dBi are achieved. The proposed antenna shows its potentials in mm-wave indoor communication.