Investigation on the Parameters Distribution and Electromagnetic Scattering of Radome Inductively Coupled Plasma

To investigate the parameters distribution and electromagnetic scattering characteristics by plasma sources is the basis to develop plasma stealth technology of radar. In this article, a radome inductively coupled plasma (ICP) source is designed. The fluid model of ICP discharge is established by COMSOL. The Boltzmann equation solver is introduced to correct the inaccuracy of the electron energy distribution function (EEDF) in the fluid model. The distribution of electron density (
$N_{\mathrm {e}}$
) and electron temperature (
$T_{\mathrm {e}}$
) in ICP under different external conditions is obtained, and the
$N_{\mathrm {e}}$
is diagnosed by microwave interference method. Then the
$N_{\mathrm {e}}$
and
$T_{\mathrm {e}}$
under steady-state are introduced into the Z transform-finite difference time-domain model to simulate the propagation characteristics of electromagnetic waves. The results indicate that the amplitude and spatial distribution of ICP parameters change significantly under different external conditions (i.e., the pressure, the gas electronegativity, and the power). Moreover, the frequency bands of wave attenuation are adjusted over a broader range by controlling the discharge conditions. Additionally, the wave vector gradient of ICP induced the reflected wave to form the pseudo point source in the high
$N_{\mathrm {e}}$
region.