A 2-axis MEMS scanning micromirror with a 45° auto-positioning mechanism for endoscopic probe

In this paper, we report a novel 2-axis electrothermal MEMS micro-scanner with an initial tilt at 45° out of its support plane. A new type of mechanical stopper is designed to hold the structure in the initial oblique bending position, which enables a cross axis decoupling. The micro-scanner is a key component of a fully integrated endoscopic imaging probe for 3D Swept Source (SS) Optical Coherence Tomography (OCT) imaging system and is developed with the objective of proposing an assembly adapted for industrial manufacturing.