Design simulation and analysis of piezoresistive micro pressure sensor for pressure range of 0 to 1MPa

In this work, we present the design, simulation and analysis of piezoresistive micro pressure sensor operable at pressure range of 0 to 1MPa. Piezoresistors are placed and are connected in the form of Wheatstone Bridge, on the diaphragm. For the design and simulation various aspects like diaphragm dimensions, placement of piezoresistors, dimensions of piezoresistors and different shapes of piezoresistors have been considered to find the best possible configuration for better sensitivity. Simulation and analysis for all the parameters mentioned above has been done using Finite element method based COMSOL Multiphysics. Simulation results show that the sensor design with two-turn meander configuration with the dimensions mentioned in the paper provide better sensitivity 35.54 mV/V/MPa over the pressure range of 0 to 1MPa.