SER scaling and trends in planar submicron technology nodes

It is important to analyze and understand the soft error rate (SER) scaling and trends when selecting a technology node and process for a product that needs to meet robust SER requirements. In this paper the SER scaling and trends normalized to FITs/Mb in planar sub-micron nodes from 90nm to 20nm are analyzed and discussed. This paper discusses and presents the SER scaling based on normalized FITs/Mb. This improves comparability versus published SER trends and scaling based on fail counts.