Development of MEMS vibrating sensor with phase-shifted optical pulse interferometry

This study aims to develop a precision sensor to realize a real-time measurement system for ground motion or dynamic behaviors of large structures. The proposed sensor uses optical interferometry that requires no electric power, which has an advantage of long-term measurement. This paper describes an experimental study of a MEMS vibration sensor. The result shows that the sensor is able to measure vibration of the sensor mass part. In addition, we have confirmed the possibility of a real-time measurement of the acceleration.