On-chip characterization of scale-factor of a MEMS gyroscope via a micro calibration platform

This paper reports characterization of a micro actuation and sensing platform for on-chip scale factor measurement and calibration of generic MEMS inertial sensors. The platform has a unique 6-DOF-motion capability that is used to deliver calibration stimuli with minimum off-axis motion, simultaneous excitation of multiple calibration axes, and on-chip measurement of acceleration sensitivities of the tested IMU. The microsystem is demonstrated to provide rotational calibration references with less than 15–30 ppm short-term instability for characterization of scale factor of a commercial gyroscope load in its full sensing range.