A uncooled multi-band metamaterial detector focal plane array for real-time multi-spectral terahertz wave sensing and imaging

We have designed, fabricated, and characterized an uncooled, multi-band sub-wavelength metamaterial detector focal plane array (FPA) for real-time multi-spectral terahertz (THz) wave sensing and imaging. A rise in temperature due to the resonant absorption by split ring resonators (SRRs) leads to an increase in the interconnected SRR array's resistance, which can be readily read out electrically. Based on a triple band metamaterial SRR design, using MEMS processing technology, we report a THz metamaterial detector FPA working at 2.5 THz, 3.4 THz, 4.3 THz, respectively. The experiment results show that our device has good sensitivities with acceptable spatial resolution and response time at all three frequency bands.