A 130 nm InP HBT integrated circuit technology for THz electronics

A 130 nm InP HBT IC technology has been developed capable of circuit demonstrations at > 600 GHz. Transistors demonstrate RF figures-of-merit f
_t
> 500 GHz and f
_max
> 1 THz. The HBTs support high current densities > 25 mA/μm
²
with a common-emitter breakdown voltage BV
_ceo
= 3.5 V. The technology includes a multi-level thin-film wiring environment capable of low-loss THz signal routing and high integration density. A large-signal HBT model has been developed capable of accurately predicting circuit performance at THz frequencies. Circuit demonstrations include fundamental oscillators and amplifiers operating at > 600 GHz as well as integrated transmitter and receiver circuits.