50×20 crossbar switch block (CSB) with two-varistors (a-Si/SiN/a-Si) selected complementary atom switch for a highly-dense reconfigurable logic

A large scale, 50×20 crossbar switch block (CSB) is newly developed for a nonvolatile, highly-dense reconfigurable logic. A compact two-varistors selected complementary atom switch (a.k.a. via-switch) is placed at each cross-point, in which the two control lines connected to the varistors can realize the multiple fan-outs without select transistors. The improved a-Si/SiN/a-Si varistor with a novel triple layered SiN shows superior nonlinearity (NL) of 1.1×10
⁵
with J
max
=1.63MA/cm
²
while keeping very low static power of 0.2μW for the CSB. The developed CSB is also applicable for nonvolatile configuration memory for look up tables (LUTs) as well as routing switches used in low power reconfigurable logic.