Nanostructuring by femtosecond laser ablation and RIE for MEMS and microfluidic systems fabrication

AlGaN/GaN based sensors should be integrated into micro-electro-mechanical-systems (MEMS) and microfluidic devices used in biotechnology. The creation of appropriate diaphragms, surface structures or a combination of them is important for the fabrication of devices required in biotechnology and interdisciplinary research. Laser ablation as a direct mask writing procedure and deep reactive ion etching were used for nanostructuring of silicon nanopillars from the opposite site of the sensor device.