Performance Evaluation of MEMS Pirani Sensors With Differently Packaged Structures

In this letter, we successfully fabricated a micro-electromechanical systems (MEMS) Pirani sensor with a three-layer packaged structure. We fabricated sensors with different layer structures, heating resistors with different resistances, and different materials. Then, we comprehensively evaluated and compared their performances. The experimental results demonstrated that the proposed Pirani sensor can measure pressures ranging from 0.1 Pa to 10 kPa, exhibiting a high responsivity within the target operating range of 1–1000 Pa. With its well-packaged micromachined design, this MEMS Pirani sensor holds significant potential for the in situ monitoring of pressure variations in a wide range of applications.