Voltage-Controlled Mechanical Oscillator Based on Superconducting Membrane

Mechanical oscillators can be implemented to store and transfer information or to build hybrid systems. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor, in which diluted photoresist or electron beam photoresist is used as sacrificial layers. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillators can be used as the capacitor of a superconducting qubit to form a coupled system. In order to control the resonant frequency of the mechanical oscillator and the microwave resonator, we introduce a dc voltage bias between the upper and lower plates of the capacitor. We analyze the electromechanical coupling such as pull-in effect and experimentally demonstrate the dependence of the resonant frequency on the applied dc voltage. These results will contribute to the design and fabrication of hybrid systems comprising voltage-controlled mechanical oscillators and other systems.