Design and Fabrication for the Construction of MIR HEB Mixers

In order to design antennas for mid-infrared (MIR) hot electron bolometers (HEBs), the surface impedance of Au thin films at cryogenic temperatures was evaluated using Fourier transform infrared spectroscopy with a sample cooling system. We fabricated resonator arrays that were constructed by gold thin film strips. The length, width, and thickness of the resonators were set at 1300, 200, and 55 nm, respectively. As the temperature was lowered, the resonant frequency was shifted to the low-frequency side. By fitting the resonant frequency to simulated results, the corrected surface reactance was established for designing MIR nano-antennas. MIR HEBs with a twin-slot antenna were designed and fabricated using the corrected surface impedance. The design frequency was 61 THz. The HEBs were formed as a superconducting strip with Au antennas and electrodes. Here, the superconductivity under the Au electrodes was suppressed by a Ni thin film. For evaluating the mixer properties of the MIR HEBs, measurement setup without beam splitter was constructed. In this setup, local oscillator power was applied directly to the HEB, and we confirmed that the critical current of the HEB can be reduced to be almost zero by the LO irradiation. The HEB responses with clear polarization dependencies were also observed.