Development of plasmonic MEMS CMOS infrared sensors for occupancy detection

In this paper, we describe the application of novel MEMS CMOS infrared (IR) sensors for developing compact filter-less occupancy detections. Using such sensors we will report the feasibility of this application in terms of the: sensitivity; response time and selectivity with and without the plasmonic structure. Furthermore, we will compare the detection range, field of view and the size of object of these sensors can detect with and without optical lens.