Evaluatioion of deuterium ion profile in (Pb,La)(Zr,Ti)O3 capacitors structures with conductive oxide top electrode by time of flight secondary ion mass spectrometry

La-doped lead zirconate titanate (Pb,La)(Zr,Ti)O
₃
(PLZT) films were prepared via chemical solution deposition. Then, Pt, Al-doped ZnO (AZO), or Sn-doped In
₂
O
₃
(ITO) top electrodes were deposited on the PLZT films to investigate ferroelectric properties. Three kinds of ferroelectric capacitors were annealed in 3% D
₂
(with N
₂
as a balance gas) to compare hydrogen-induced degradation of ferroelectric properties. Deuterium ion in ferroelectric capacitor was evaluated by time of flight secondary ion mass spectrometry. For ferroelectric capacitor with Pt top electrode, deuterium ion was detected in PLZT films after 5 min D
₂
annealing. On the other hands, deuterium ion was slightly detected with AZO and was not detected at all with ITO even after 120 min D
₂
annealing.