LIDAR system using indirect time of flight method and MEMS scanner for distance measurement

In this paper, we present a LIDAR(Light Detection And Ranging) system as an application of the MEMS(Micro Electro Mechanical System) scanner that was developed in our previous research. The electromagnetically actuated 2-axis driving MEMS scanner operated about the X axis at 1.4 kHz and about the Y axis at 10 Hz is applied for LIDAR system that provides measurement of the distance to an object. We adopt the indirect time of flight method for distance measurement. We measured the distance through the single laser spot and scanning laser beam using MEMS scanner. The measured distance at 1, 2 and 3 m through single laser spot were 118±15 cm, 207.8±23.4 cm and 310±48.3 cm, respectively. The measured distance at 1, 2 and 3 m through scanning laser beam using MEMS scanner were 118±15 cm, 207.8±23.4 cm and 310±48.3 cm, respectively.