Layout dependent BTI and HCI degradation in nano CMOS technology: A new time-dependent LDE and impacts on circuit at end of life

In this paper, the newly-found time-dependent layout dependent effects (LDE) due to layout dependency of device aging is presented. BTI and HCI degradation in nanoscale HKMG devices exhibits evident layout dependency, which will significantly complicate the circuit design. With the analysis on circuit level, the time-dependent LDE should be considered to ensure enough design margin, especially at end of life. This work is helpful to design-technology co-optimization at nanoscale nodes.