On-chip high performance magnetics for point-of-load high-frequency DC-DC converters

This paper presents the design, fabrication, and characterization of on silicon integrated micro-transformers for high frequency power applications. The microtransformer device is used and tested in DC-DC converter application at high switching frequency. This device has stable L vs. f characteristic up to 50 MHz. The design is improved regarding to the electrical resistance and current capability. The microtransformer shows an inductivity of about 60 nH, resistance of 350 mΩ and can be applied for current up to 1.5 A.