Hysteresis Segmentation Modeling and Experiment of Piezoelectric Ceramic Actuator

Piezoelectric ceramics have been widely used in ultraprecision displacement drive systems because of their excellent performance such as fast response and high positioning accuracy. However, its tracking control accuracy is limited by its inherent hysteresis nonlinearity. To date, the parameter identification of the hysteresis model that has been developed is complex. This situation has resulted in the difficulty for the model to be used in the real-time control system of piezoelectric ceramic actuators. This article proposed a new mathematical model that can accurately describe hysteresis nonlinearity. The hysteresis main loop in the model is approximated using high-order rational fractions. The hysteresis segmentation model is completed through the recursive algorithm. Simulation and experimental results show that the hysteresis characteristics between the input voltages and output displacements have been clearly modeled. This segmentation modeling process is simple. In addition, the computation is low and accuracy is high. The model proposed in this article can complete the modeling of complex hysteresis phenomena of the multidegree-of-freedom micromotion stage with force–voltage coupling. Through a series of experiments to verify the effectiveness of the model in this article, thereby laying the model foundation for the subsequent control of the piezoelectric ceramic actuator. This result also provides a strong scientific basis for future research on the application of piezoelectric ceramic actuators in ultraprecision motion systems and further improves the positioning accuracy of the system.