Digital Control and Readout of MEMS Gyroscope Using Second-Order Sliding Mode Control

Microelectromechanical system (MEMS) is a kind of MEMS that has been utilized to monitor the angular speed of moving objects on several occasions and has attracted the interest of several organizations across the globe. This type of sensor has the benefits of excellent integration, cheap cost, and low power utilization. This study begins by describing the research and development of silicon MEMS gyroscopes since the 1980s, including the work of several universities, such as Draper Laboratory and UC Berkeley, as well as various design ideas, control systems, and architectures. Matching resonance frequencies of the driving and sense mechanical resonators may significantly improve the efficiency of MEMS gyroscopes. In a closed-loop readout circuit, however, exact control of the resonance frequency is difficult. Because of their inexpensive production costs in large numbers, MEMS gyroscopes are gaining appeal. Because of substantial nonstationary noise processes in the output of MEMS gyros, such as 1/
${f}$
noise, this creates difficulty for navigation system designing. In the implementation, relative error in ramp and step function is determined through the proposed methodology. Furthermore, the second-order sliding mode control (SoSMC) is used in the sliding mode of the gyroscope to minimize the chattering effect.