A MOEMS Accelerometer Based on the Magneto-Optical Rotation Effect

A new principle MOEMS accelerometer based on the magneto-optical rotation effect is developed. The design of the magnetic film integrates with the proof mass, using a magneto-optic crystal to detect the magnetic field changes induced by the external acceleration to produce the magneto-optical rotation effect. By detecting the optical rotation angle, the high precision measurement of the acceleration is realized. The structure of the accelerometer was fabricated through structural design, simulation and micro-nano processing technology. The test results show that the noise spectral density of the MOEMS accelerometer is
$10.5\mu \text{g}/\surd $
Hz at 1Hz, the bias instability is
$37.6\mu \text{g}$
and the output sensitivity is 330.2mV/g.