Monolithic Fully Decoupled Tri-Axis Gyroscope With Lateral-Comb and Low Cross-Coupling

Multi-axis integration is important for micro-electromechanical system(MEMS) gyroscopes in the future. In this paper, a monolithic integrated tri-axis gyroscope and interface circuit are designed and implemented. The presented tri-axis gyroscope with single drive and multi sense axes is fully decoupled in structure among the drive and sense modes. Quadrature coupling can also be further reduced by the in-plane and out-of-plane correction electrodes. The pitch(roll) structure is designed as a unilateral unequal height comb, which reduces the damping and improves the Q value of pitch and roll modes and simplifies the fabrication process. In addition, the interface circuit adopts a closed-loop drive and open-loop sense circuit, an additional decoupling module that effectively reduces the cross axis sensitivity. Finally, a gyroscope prototype was tested to evaluate its performance. The designed tri-axis gyroscope has low bias instability(1.2821°/h) and good noise performance(0.1635°/
$\surd \text{h}$
). The coupling coefficient is even below 1% after adding decoupling modules. Meanwhile, the bandwidth can meet the needs of the gyroscope working in a low-frequency environment.