Experimental Data-Driven Study for the Choice of Fabrication Process for Pirani-Based Multifunction Sensor

In this paper, based on experimental results from sensors implemented in two SOI (Silicon On Insulator) processes offered by MEMSCAP (
$10~\mu \text{m}$
and
$25~\mu \text{m}$
), a comparative study of the implementation of a Pirani-based multifunction sensor has been conducted. The purpose of this study is to choose the most adequate process for the design and implementation of Pirani-based multifunction sensor for both temperature and pressure measurement. Particularly unlike the conventional use of Pirani Vacuum sensor, the Pirani-based sensor is exploited for near and even above atmospheric pressure measurement. The comparison is made in terms of sensor implementation robustness against technological dispersions, its impact on temperature measurement and on pressure measurement under atmospheric condition (1Bar). The optimized design of the multifunction sensor is also investigated through the choice of sensor resistance by way of power consumption, electro-thermal conversion as well as measurement resolution. A design guideline is provided. The experimental results have put into evidence that a better performance is achieved with the
$25~\mu \text{m}$
process.