Multiparameter Modeling of Piezoelectric Six-Degree-of-Freedom Accelerometer About Sensitivity Characteristics

In order to realize the active design of six-degree-of-freedom (6-DOF) accelerometer based on sensitivity characteristics, it is necessary to develop the multi-parameter modeling of accelerometer sensitivity characteristics. Based on (6-DOF) piezoelectric accelerometer sensitivity characteristics of parametric modeling, the multi-parameter model is deduced through the analysis of (6-DOF) piezoelectric accelerometer static structure and the measuring principle of sensitivity features. The ANSYS software is used for the numerical simulation of multiple sets of models, and the (6-DOF) accelerometer prototype is fabricated. Equivalent static calibration experiments are proposed, and the experimental results show that the multi-parameter model and numerical simulation of sensitivity characteristics have the same rule and the same trend as the test results of the accelerometer experimental prototype, which verifies the effectiveness of the proposed multi-parameter model and method. This study lays a theoretical foundation for further research on active design method of piezoelectric (6-DOF) accelerometer.