High Performance SnO2/MoS2-Based Surface Acoustic Wave Humidity Sensor With Good Linearity

In this work, we developed a high-performance SAW humidity sensor based on SnO
₂
/MoS
₂
nanocomposite as the sensitive layer while PMN-PT as the piezoelectric layer. The SAW device was fabricated via thinning bulk PMN-PT and standard photolithography and ion beam etching process. After that, the humidity sensor was assembled by drop-casting hydrothermal synthetic SnO
₂
/MoS
₂
composite on the SAW device. The exploit of sensing layer SnO
₂
/MoS
₂
result in the high performance of the sensor because of its excellent humidity sensing behavior. Therefore, this humidity sensor exhibited both an excellent linearity of R
²
> 0.98 in all detecting range (10-90%RH) and high sensitivity of 0.78 kHz/%RH and 8.87 ppm/%RH. Meanwhile, low hysteresis characteristic, good repeatability and long-term stability were also achieved, indicating that this developed sensor is a favourable candidate for humidity detection.